High-level integrated optical detector system with built-in micro-hole chip

In order to meet the increasingly compact and highly integrated requirements of the detector system, silicon sensor, the industry leader in Si sensors, adopted a new chip manufacturing technology by presetting the cavity inside the silicon wafer of the detector. Fix the light source on the detector chip mold. This design idea makes more compact detector concepts a reality.

With the development of PIN photodiodes, Silicon Sensor has adopted a simpler way to develop high-performance sensor chips with built-in light sources or optical fibers, while also ensuring the accuracy and compactness of the chips.

The opening area inside the detector chip mold can be covered with a photolithography mask pattern or a filter. The size of the micro-hole can be determined according to the laser light source, the LED light source or the specific spot size. This micro-hole chip technology can be used for light scattering detection, and can also be used with an axis-symmetric detection system and a micro-tube installation detection system. This chip is also suitable for switches, terminals and color detection in severe environments. It can also detect the displacement of tiny objects.

In the following diagram, we have reserved a rectangular hole with a side length of 500μm for the light source in the single-area detector. The table shows the characteristics of the measured dark current. In order to achieve the best design of the detector, it can also be designed as a hole with other geometric shapes.

The chip uses a high-resistance epitaxial silicon wafer, and can also use a bulk substrate or a wafer bonding matrix. The use of a special antireflection coating can make the detector have the best sensitivity for a specific wavelength.

We also provide four-quadrant chips or multi-zone diodes (as shown in the figure below) to manufacture suitable axisymmetric detectors.

The existing technology can also manufacture detectors for multispectral measurement by stacking chips, as shown in the figure below. By properly designing the upper and lower diodes, the detector can be well used for this application.

Silicon Sensor provides trimming technology for complex sensor applications.

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